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P04100 - SEMI P41 - XMLによる,検査装置,修正装置およびレビュー装置間で取扱うマスク欠陥データ仕様 Revision:SEMI P41-0304E - Inactive This Specification covers the characteristics

SKU: 10042986673
4.7

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Description

This Specification covers the characteristics specific to attenuated phase shift masks and mask blanks

and packaging prior to transport

orgで。初版は2003年11月に発行された。

which is commonly applied in both applications

In combination with thermal desorption

P04100 - SEMI P41 - XMLによる,検査装置,修正装置およびレビュー装置間で取扱うマスク欠陥データ仕様 Revision:SEMI P41-0304E - Inactive This Specification covers the characteristicsNOTICE: This translation is a REFERENCE COPY ONLY. If differences should exist between the English version and a translation in any other language, the English version is the official and authoritative version. SEMI SEMI Global Micropatterning CommitteeJapanese Micropatterning Committee2009Japanese Regional Standards Committee20042www. semi. org20043 E 2004923 NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to

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