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D01700 - SEMI D17 - FPDガラス基板搬送用カセットの機械的仕様 StdPbc-0914 1-0298 (technical revision)

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Description

1-0298 (technical revision)

automotive

SEMI E10-0304 (technical revision)

which can make applicability of the standards more widely

orgで入手可能となる。初版は2009年3月発行,前版は2009年7月発行。

D01700 - SEMI D17 - FPDガラス基板搬送用カセットの機械的仕様 StdPbc-0914 1-0298 (technical revision)Global Flat Panel Display Equipment CommitteeNorth American Flat Panel Display Committee19991215North American Regional Standards Committee20001SEMI On Line2000219989 FPD SEMI D18 Referenced SEMI Standards SEMI D18 Specification for Cassettes Used for Horizontal Transport and Storage of Flat Panel Display Substrates SEMI E15 Specification for Tool Load Port

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