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1-0308 (technical revision)
SEMI C27-0699 (first published - replaces SEMI C1
Further information regarding UPW systems can be found in SEMI F61
• Reduction of communication and computation overhead and cost due to recipe download related transactions by adopting cache operation
SEMI G74 — Specification for Tape Frame for 300 mm Wafers
E12000 - SEMI E120 - COMMON EQUIPMENT MODEL 사양 StdPbc-0823 1-0308 (technical revision)This Standard was technically approved by the Information & Control Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on December 23, 2013. Available at www. semiviews. org and www. semi. org in April 2014; originally published March 2003; previously published March 2010. The purpose of this Specification is to provide a generally applicable object model of semiconductor equipment
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