C03800 - SEMI C38 - Guide for Phosphorus Oxychloride StdDcs-Withdrawn - Historical NOTICE: Paragraphs entitled NOTE are

NOTICE: Paragraphs entitled NOTE are not an official part of this Document and are not intended to modify or supersede it

This Standard describes a framework for identifying and classifying technical training tiers

provide the ordering information for test

SEMI E88-0303 (technical revision)

この作業方法では，次の事項を取り扱う。

C03800 - SEMI C38 - Guide for Phosphorus Oxychloride StdDcs-Withdrawn - Historical NOTICE: Paragraphs entitled NOTE areNOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use. 1 Purpose 1. 1 The purpose of this Standard is to provide a guide for a grade of phosphorus oxychloride for which a need has been identified. 2 Scope 2. 1 This Standard lists the proposed impurity limits of phosphorus