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SEMI E112-1213 (technical revision)
SEMI E157-1125 (technical revision)
the behavior of the equipment in relation to processing
There is a need to define standardized descriptive terms
allowing the state of the equipment to be determined by the states of its major modules
E04000 - SEMI E40 - Specification for Processing Management StdTpc-Terminology SEMI E112-1213 (technical revision)* This Standard has the option to purchase the Current document with a redline document (Current + Redline). The redline document is included with the Current document as a comparison tool to help identify changes that have been made between the Current version and the previous version (Superseded). If differences should exist between the redline document and the Current document, the Current version is the official and authoritative version. 1
