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Semiconductor and FPD factories require high levels of power quality due to the sensitivity of equipment and process controls
35-92 (technical revision)
2-1016 (Reapproved 0224)
some of electronic paper displays are equipped with front light
Only the mechanical interface is specified
E00600 - SEMI E6 - 半導体製造装置の設置に関する文書のガイド Revision:SEMI E6-0303 - Superseded Semiconductor and FPD factories requireGlobal Facilities CommitteeNorth American Facilities Committee20021122North American Regional Standards Committee20031www. semi. org200331982199612 : 2002SEMI E6 Referenced SEMI Standards SEMI E30 Generic Model for Communications and Control of Manufacturing Equipment (GEM) SEMI E52 Practice for Referencing Gases Used in Digital Mass Flow Controllers SEMI E63 Mechanical Specification for 300 mm Box Opener Loader to Tool Standard (BOLT)
US$ 180.84
US$ 7418.89
US$ 3179.30
