S01600 - SEMI S16 - 半導體製造設備壽命終了階段減少環境衝擊的設計基準 Lang-Japanese and the environment) associated with

and the environment) associated with the equipment

A standard interface is required for containers intended to control the transport environment of cassettes containing substrates

This Test Method is suitable for use in research and development

本テストの目的は，高純度ガスシステムでの使用を意図したマスフローコントローラにより，パーティクル発生を測定することである。

Equipment Communications Standard (SECS-I)

S01600 - SEMI S16 - 半導體製造設備壽命終了階段減少環境衝擊的設計基準 Lang-Japanese and the environment) associated with2006112120072www. semi. org320006 2007 SME SME SME Referenced SEMI Standards SEMI S2 Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment SEMI S12 Guidelines for Equipment Decontamination SEMI S13 Environmental, Health and Safety Guideline for Documents Provided to the Equipment User for Use with Semiconductor Manufacturing Equipment