F08700 - SEMI F87 - Specification for Dimension of Three Port Components (Except MFC/MFM) for 1.125 Inch Type Four Fastener Configuration Surface Mount Gas Distribution Systems Revision:SEMI F87-0304 - Superseded This Specification describes the volume

This Specification describes the volume within any process or cassette module which shall be accessible to the transport module end effector in a cluster tool

SEMI PV66-0715 (Reapproved 0221)

Module manufacturers and buyers

together with test methods suitable for determining their magnitudes

本文書は，適用可能なSEMI「S」シリーズの文書または評価購入者によって要求されたときに，この情報をどのように伝達すべきかに関するガイダンスを提供する。

F08700 - SEMI F87 - Specification for Dimension of Three Port Components (Except MFC/MFM) for 1.125 Inch Type Four Fastener Configuration Surface Mount Gas Distribution Systems Revision:SEMI F87-0304 - Superseded This Specification describes the volumeNOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use. 1 Purpose 1. 1 This Standard establishes the properties and physical dimensions of two port components for 1. 125 inch type surface mount gas distribution system. 2 Scope 2. 1 This Standard includes common requirements,