P04600 - SEMI P46 - Specification for Critical Dimension (CD) Measurement Information Data on Photomask by XML Revision:SEMI P46-0706 - Superseded This Safety Guideline is intended

This Safety Guideline is intended to be used by those working or doing research in semiconductor-related technology

the behavior of the equipment in relation to interactive exception handling

and for determining the temperature of the specimen during the measurement are also given

storage or a combination of both transport and storage as perceived by a SEMI Equipment Communications Standard 2 (SECS-II) host that complies with the GEM model (as specified in § 11)

-        Handling and processing shipping cartons of cells/modules in a fab

P04600 - SEMI P46 - Specification for Critical Dimension (CD) Measurement Information Data on Photomask by XML Revision:SEMI P46-0706 - Superseded This Safety Guideline is intendedThis Standard was technically approved by the Micropatterning Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on September 12, 2011. Available at www. semiviews. org and www. semi. org in November 2011; originally published July 2006. NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards