C06200 - SEMI C62 - Specification for Progen Precursors Used in Low K CVD Processes Revision:SEMI C62-1107 - Superseded The purposes of this Document

The purposes of this Document are (1) to set a maximum permissible particle concentration for 10/0

FPD用ガラス基板のサプライヤとユーザにより使用されることを目的としている。

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2 This standard specifies procedures to measure extractable metal impurities from perfluoroalkoxy alkane (PFA) and other fluorinated materials and from high purity liquid distribution components

Flat Panel Display - Factory Automation Global Technical Committee で技術的に承認されたもので，Korean Flat Panel Display Working Groupが直接責任を負うものである。現版は2004年11月24日Japan Regional Standards Committeeにて承認されている。2005年1月にまずwww

C06200 - SEMI C62 - Specification for Progen Precursors Used in Low K CVD Processes Revision:SEMI C62-1107 - Superseded The purposes of this DocumentThis Standard was technically approved by the Liquid Chemicals Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on December 13, 2017. Available at www. semiviews. org and www. semi. org in June 2018; originally published November 2007; previously published March 2009. The purpose of this Document is to provide specifications for porogen precursors used in Low K CVD processes for which