E07400 - SEMI E74 - Specification for Vacuum Pump Interfaces - Turbomolecular Pumps StdTpc-Equipment Models These requirements are consistent with

These requirements are consistent with the requirements of SEMI M45

身元の確認および資格認定のため，従業員とシステムセキュリティの関係を管理する。

IMSは，表面の有機汚染を測定する，容易で，広汎に使用可能で，ぶれが少なくしかも感度の高い方法であることから，この汚染の測定法として選ばれている。

stacking faults

SEMI 3D9-0914 (first published)

E07400 - SEMI E74 - Specification for Vacuum Pump Interfaces - Turbomolecular Pumps StdTpc-Equipment Models These requirements are consistent withNOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use. This Standard specifies the physical and electrical interfaces for turbomolecular pump (TMP) type vacuum pumps. Standardization of pump interfaces will allow for interchangeability of pumps. Device manufacturers use this