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NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met
a cryogenic gas derived from liquid air by fractional distillation
8 mm to 1620 mm × 1780 mm
Initial filter cleanliness
and (2) to describe a reference method for its verification
D02400 - SEMI D24 - FPD用ガラス基板の仕様 StdVol-3D-IC NOTICE: This Standard or SafetyNOTICE: This translation is a REFERENCE COPY ONLY. If differences should exist between the English version and a translation in any other language, the English version is the official and authoritative version. SEMI SEMI Flat Panel Display Factory Automation Global Technical Committee2006516global Audits and Reviews Subcommittee20066www. semi. org20002 NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain
