F03800 - SEMI F38 - ユースポイントガスフィルタの効率資格付けを目的とした試験方法 StdPbc-0613 outside of a data collection

outside of a data collection plan

Alternative methods may also be used as long as they comply with SEMI C1 requirements for method validation

帯電したウェーハやレチクルの表面は微粒子を吸着（静電気吸着，ESA： electrostatic attraction）し，不良率を増やす｡

2 — Guide for the Qualification of Polymer Assemblies Used in Ultrapure Water and Liquid Chemical Systems in Semiconductor Process Equipment

SEMI E158 — Specification for Mechanical Features of Fab Wafer Carrier Used to Transport and Store 450 mm Wafers (450 FOUP) and Kinematic Coupling

F03800 - SEMI F38 - ユースポイントガスフィルタの効率資格付けを目的とした試験方法 StdPbc-0613 outside of a data collectionglobal Gases Committee2011513global Audits and Reviews Subcommittee20116www. semiviews. org www. semi. org19996200411 : POU Referenced SEMI Standards None.