F09100 - SEMI F91 - Specification for Dimension of Compact Size Two Port Components (Except MFC/MFM) for 1.5 Inch Type Two Fastener Configuration Surface Mount Gas Distribution Systems Revision:SEMI F91-0312 - Superseded Referenced SEMI Standards (purchase separately)

Referenced SEMI Standards (purchase separately)

where at least one is a device wafer

安全原則（第6節）

1  In Test Method 1

Specification for manual valves should be separately provided as needed

F09100 - SEMI F91 - Specification for Dimension of Compact Size Two Port Components (Except MFC/MFM) for 1.5 Inch Type Two Fastener Configuration Surface Mount Gas Distribution Systems Revision:SEMI F91-0312 - Superseded Referenced SEMI Standards (purchase separately)This Standard was technically approved by the global Gases Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on August 30, 2012. Available at www. semiviews. org and www. semi. org in October 2012; originally published March 2004; previously published March 2012. This Standard establishes the properties and physical dimensions of two port components for 1. 5 inch type surface mount gas