E16300 - SEMI E163 - 特別に指定されたエリア内のレチクルおよびその他の静電気超敏感性（EES：EXTREMELY ELECTROSTATIC SENSITIVE）アイテムの取り扱いのためのガイド StdTpc-Electromagnetic Compatibility signage and solid-state lighting

signage and solid-state lighting

This Standard was technically approved by the global Assembly & Packaging Technical Committee

SEMI E62 — Provisional Specification for 300 mm Front-Opening Interface Mechanical Standard (FIMS)

SEMI E118 — Specification for Wafer ID Reader Communication Interface – The Wafer ID Reader Functional Standard: Concepts

It may be applied to other types of semiconductor wafers if the flat locations are properly taken into account or if the fiducial is a notch

E16300 - SEMI E163 - 特別に指定されたエリア内のレチクルおよびその他の静電気超敏感性（EES：EXTREMELY ELECTROSTATIC SENSITIVE）アイテムの取り扱いのためのガイド StdTpc-Electromagnetic Compatibility signage and solid-state lightingglobal Metrics Technical Committee20111224global Audits and Reviews Subcommittee20122www. semiviews. org www. semi. org EESSEMI E78 SEMI E129 EES EES HBM100VANSI ESD S20. 20 SEMI E78SEMI E129SEMI E43 EES EESEESCDMFPD Referenced SEMI Standards SEMI E43 Recommended Practice for Electrostatic Measurements on Objects and Surfaces SEMI E78 Guide to Assess and Control Electrostatic Discharge (ESD) and Electrostatic Attraction (ESA) for Equipment SEMI E129