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C05300 - SEMI C53 - Specifications for Dimethyl Sulfoxide (DMSO) [Grades 1 and 2] StdDcs-Current orgで入手可能となる。初版は2006年7月出版。

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orgで入手可能となる。初版は2006年7月出版。

org in June 2009

The use of AFM for measuring the roughness of polymer surfaces is outlined in this test method

Due to the migration to large substrate sizes in FPD production

OC(オリエンテーションコーナ)により識別していた情報に加え,基板ごとのID等の情報を加えることができる。

C05300 - SEMI C53 - Specifications for Dimethyl Sulfoxide (DMSO) [Grades 1 and 2] StdDcs-Current orgで入手可能となる。初版は2006年7月出版。NOTICE: This Document was reapproved with minor editorial changes. The purpose of this Document is to standardize requirements for dimethyl sulfoxide used in the semiconductor industry and testing procedures to support those standards. Test methods have been shown to give statistically valid results. Referenced SEMI Standards SEMI C1 Guide for the Analysis of Liquid Chemicals

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